articleTop 1% cited
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
Thin Solid Films · 2008 · Vol. 517(6) · pp. 1858–1867
G. C. A. M. Janssen✉(Delft University of Technology)Mostafa Abdalla(Delft University of Technology)Fred van Keulen(Delft University of Technology)B. R. Pujada(Materials innovation institute)Bart van Venrooy(Netherlands Organisation for Applied Scientific Research)
Advanced Surface Polishing TechniquesThin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesMaterials scienceWaferSubstrate (aquarium)SiliconIsotropyCurvatureComposite materialStress (linguistics)Thin filmOptics
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684
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References
Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
IEEE Transactions on Electron Devices · 1987 · 584 citations
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