articleTop 10% cited
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
Journal of materials research/Pratt's guide to venture capital sources · 1992 · Vol. 7(12) · pp. 3242–3249
Joost J. Vlassak✉(Stanford University)William D. Nix(Stanford University)
Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMaterials sciencePoisson's ratioNanoindentationModulusSilicon nitrideComposite materialDeflection (physics)Residual stressYoung's modulusPoisson distribution
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References
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26,236 citations
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