articleTop 10% cited
A bidirectional silicon micropump
Sensors and Actuators A Physical · 1995 · Vol. 50(1-2) · pp. 81–86
Roland Zengerle✉(Hahn-Schickard-Gesellschaft für angewandte Forschung)Joachim Ulrich(Siemens (Germany))Stefan Kluge(Fraunhofer Society)Martin Richter(Fraunhofer Society)Α. Richter(Fraunhofer Society)
Microfluidic and Capillary Electrophoresis ApplicationsAdvanced Sensor and Energy Harvesting MaterialsAdvanced MEMS and NEMS TechnologiesMicropumpDiaphragm (acoustics)SiliconMaterials scienceDiaphragm pumpAcousticsElectrical engineeringOptoelectronicsMechanical engineeringEngineering
Citations
313
FWCI
6.87
field-weighted impact
References
13
Percentile
98%
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Cited by
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References
A valveless diffuser/nozzle-based fluid pump
Sensors and Actuators A Physical · 1993 · 661 citations
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