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Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

Sensors and Actuators A Physical · 2002 · Vol. 102(1-2) · pp. 139–150
Wenhua ZhangRajashree BaskaranKimberly L. Turner
Mechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesParametric oscillatorParametric statisticsNonlinear systemResonance (particle physics)PhysicsInstabilityControl theory (sociology)AcousticsMechanicsComputer science

Funding

  • National Science Foundation
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References
Mechanical-thermal noise in micromachined acoustic and vibration sensors
IEEE Transactions on Electron Devices · 1993 · 733 citations
<i>The Theory of Sound</i>
Physics Today · 1957 · 3,480 citations
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