articleTop 1% cited
Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration
Sensors and Actuators A Physical · 1998 · Vol. 64(1) · pp. 87–93
Kazuo Sato✉(Nagoya University)Mitsuhiro Shikida(Nagoya University)Yoshihiro Matsushima(Nagoya University)Takashi Yamashiro(Nagoya University)Kazuo Asaumi(Mount Fuji Research Institute)Yasuroh Iriye(Mount Fuji Research Institute)Masaharu Yamamoto(Aichi Prefectural Government)
Advanced MEMS and NEMS TechnologiesNanowire Synthesis and ApplicationsSilicon Nanostructures and PhotoluminescenceSiliconEtching (microfabrication)Materials scienceEtch pit densityIsotropic etchingAnisotropyMicrostructureCharacterization (materials science)Crystal (programming language)Orientation (vector space)
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References
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
Journal of The Electrochemical Society · 1990 · 1,599 citations
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