articleTop 10% cited
Metal-assisted chemical etching of silicon in HF–H2O2
Electrochimica Acta · 2008 · Vol. 53(17) · pp. 5509–5516
Camille Chartier(Institut de Chimie et des Matériaux Paris-Est)Stéphane Bastide✉(Centre National de la Recherche Scientifique)Claude Lévy‐Clément✉(Centre National de la Recherche Scientifique)
Silicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsSemiconductor materials and devicesDissolutionEtching (microfabrication)SiliconNanoparticleChemical engineeringMetalIsotropic etchingPolishingMaterials scienceOxide
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Cited by
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References
The nature of the chemical bond—1992
Journal of Chemical Education · 1992 · 13,126 citations
Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
Applied Physics Letters · 1990 · 7,941 citations
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