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Optical stethoscopy: Image recording with resolution λ/20

Applied Physics Letters · 1984 · Vol. 44(7) · pp. 651–653

Dieter Pohl✉(IBM Research - Zurich)Winfried Denk(IBM Research - Zurich)M. Lanz(IBM Research - Zurich)

Abstract

Subwave length-resolution optical image recording is demonstrated by moving an extremely narrow aperture along a test object equipped with fine-line structures. Details of 25-nm size can be recognized using 488-nm radiation. The result indicates a resolving power of at least λ/20 which is to be compared with the values of λ/2.3 obtainable in conventional optical microscopy.

Near-Field Optical Microscopy Integrated Circuits and Semiconductor Failure Analysis Microwave and Dielectric Measurement TechniquesOpticsResolution (logic)Image resolutionOptical microscopeMaterials scienceOptical recordingOptical powerMicroscopyAperture (computer memory)Optoelectronics

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