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Nucleation and growth in TiO2 films prepared by sputtering and evaporation

Thin Solid Films · 1994 · Vol. 251(1) · pp. 72–79
P. LöblM. HuppertzDieter Mergel
ZnO doping and propertiesSemiconductor materials and devicesCopper-based nanomaterials and applicationsAnataseRutileAmorphous solidNucleationSputteringMaterials scienceThin filmAnnealing (glass)Chemical engineeringSputter deposition
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410
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4.63
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Nucleation and growth in TiO2 films prepared by sputtering and evaporation · Scinovex