articleTop 1% cited
A mechanism of surface micro-roughening by ion bombardment
Journal of Materials Science · 1973 · Vol. 8(11) · pp. 1545–1553
Peter Sigmund✉(Ørsted (Denmark))
Ion-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials ResearchSputteringImpact craterMaterials scienceIonIrradiationPenetration (warfare)RidgeGroove (engineering)Yield (engineering)Molecular physics
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Cited by
Morphology of ion-sputtered surfaces
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Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 291 citations
References
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Physical Review · 1969 · 3,499 citations
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