articleTop 1% cited
Hot embossing as a method for the fabrication of polymer high aspect ratio structures
Sensors and Actuators A Physical · 2000 · Vol. 83(1-3) · pp. 130–135
Holger Becker✉(Jenoptik (Germany))Ulf Heim(Jenoptik (Germany))
Nanofabrication and Lithography TechniquesMicrofluidic and Capillary Electrophoresis ApplicationsMicrofluidic and Bio-sensing TechnologiesMicrofabricationEmbossingFabricationMaterials scienceMicroelectromechanical systemsPolymerReplication (statistics)Surface micromachiningNanotechnologySilicon
Funding
- Imperial College London
- Technische Universität Ilmenau
Citations
660
FWCI
13.66
field-weighted impact
References
22
Percentile
99%
vs. same field & year
Citations per year
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Hot embossing as a method for the fabrication of polymer high aspect ratio structures
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