article
Damping characteristics of beam-shaped micro-oscillators
Sensors and Actuators A Physical · 1995 · Vol. 49(1-2) · pp. 87–95
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and ApplicationsCantileverPermalloyBeam (structure)MechanicsMaterials scienceDamping ratioDamping torqueMagnetic dampingTransverse planeStructural engineering
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395
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2.64
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17
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88%
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