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A review of nanometer resolution position sensors: Operation and performance
Sensors and Actuators A Physical · 2012 · Vol. 190 · pp. 106–126
Andrew J. Fleming✉(University of Newcastle Australia)
Advanced MEMS and NEMS TechnologiesAdvanced Measurement and Metrology TechniquesSensor Technology and Measurement SystemsLinearityPiezoresistive effectCapacitive sensingPosition sensorComputer scienceElectronic engineeringResistive touchscreenInductive sensorPosition (finance)Electrical engineering
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