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Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Timothy P. WeihsSoon-Il HongJ. C. BravmanWilliam D. Nix
Force Microscopy Techniques and ApplicationsMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesNanoindenterMaterials scienceCantileverDeflection (physics)Thin filmIndentationComposite materialSurface micromachiningNanoindentationBeam (structure)

Funding

  • University of California, Santa Barbara
  • Office of Naval Research
Citations
377
FWCI
2.51
field-weighted impact
References
15
Percentile
89%
vs. same field & year
Citations per year
References
A method for interpreting the data from depth-sensing indentation instruments
Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2,800 citations
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Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films · Scinovex