article Open AccessTop 10% cited
Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films
Sensors and Actuators A Physical · 1999 · Vol. 77(2) · pp. 106–112
M.-A. Dubois✉(École Polytechnique Fédérale de Lausanne)Paul Muralt(École Polytechnique Fédérale de Lausanne)
Acoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave PropagationFerroelectric and Piezoelectric MaterialsLead zirconate titanatePiezoelectricityMaterials sciencePiezoelectric coefficientTetragonal crystal systemNitrideThin filmComposite materialTransverse planeAluminium
Citations
298
FWCI
7.35
field-weighted impact
References
16
Percentile
98%
vs. same field & year
Citations per year
Cited by
{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Sensors and Actuators A Physical · 2003 · 391 citations
Citation Network
How this paper connects to the literature. Drag to explore, click any node to open that paper.