article Open AccessTop 1% cited
{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Sensors and Actuators A Physical · 2003 · Vol. 105(2) · pp. 162–170
Nicolas Ledermann(École Polytechnique Fédérale de Lausanne)Paul Muralt✉(École Polytechnique Fédérale de Lausanne)J. Baborowski(École Polytechnique Fédérale de Lausanne)Sandrine Gentil(École Polytechnique Fédérale de Lausanne)Kapil Mukati(École Polytechnique Fédérale de Lausanne)Marco Cantoni(École Polytechnique Fédérale de Lausanne)Andreas Seifert(École Polytechnique Fédérale de Lausanne)N. Setter(École Polytechnique Fédérale de Lausanne)
Ferroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting MaterialsMaterials sciencePiezoelectricityNucleationThin filmMicroelectromechanical systemsPiezoelectric coefficientComposite materialTexture (cosmology)CrystallizationSilicon
Funding
- École Polytechnique Fédérale de Lausanne
- Branco Weiss Fellowship – Society in Science
- Eidgenössische Technische Hochschule Zürich
- Center for Innovative Medicine
Citations
391
FWCI
12.33
field-weighted impact
References
42
Percentile
99%
vs. same field & year
Citations per year
Cited by
Ferroelectric thin films: Review of materials, properties, and applications
Journal of Applied Physics · 2006 · 1,858 citations
References
Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films
Sensors and Actuators A Physical · 1999 · 298 citations
Interferometric measurements of electric field-induced displacements in piezoelectric thin films
Review of Scientific Instruments · 1996 · 414 citations
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