articleTop 1% cited
Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS
Sensors and Actuators A Physical · 2009 · Vol. 151(2) · pp. 95–99
Florian Schneider✉(University of Freiburg)Jan Draheim(University of Freiburg)Robert Kamberger(University of Freiburg)Ulrike Wallrabe(University of Freiburg)
Advanced MEMS and NEMS TechnologiesElectrowetting and Microfluidic TechnologiesMicrofluidic and Capillary Electrophoresis ApplicationsPolydimethylsiloxaneMaterials scienceMicroelectromechanical systemsRheologyComposite materialModulusViscosityDispersion (optics)Elastic modulusWavelength
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