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Track formation and fabrication of nanostructures with MeV-ion beams

M. ToulemondeC. TrautmannE. BalanzatKlas HjortA. Weidinger
Ion-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials ResearchIon trackMaterials scienceNanowireIonNanostructureFabricationSwift heavy ionLithographyEtching (microfabrication)Nanometre
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256
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11.91
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References
Transient thermal processes in heavy ion irradiation of crystalline inorganic insulators
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 476 citations
Swift heavy ions in insulating and conducting oxides: tracks and physical properties
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 325 citations
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