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A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout
Sensors and Actuators B Chemical · 2001 · Vol. 77(1-2) · pp. 122–131
F. Battiston✉(University of Basel)J.-P. Ramseyer(University of Basel)H.P. Lang(IBM Research - Zurich)Marko Baller(IBM Research - Zurich)Ch. Gerber(IBM Research - Zurich)James K. Gimzewski(IBM Research - Zurich)Ernst Meyer(University of Basel)H.‐J. Güntherodt(University of Basel)
Mechanical and Optical ResonatorsForce Microscopy Techniques and ApplicationsPhotonic and Optical DevicesCantileverMaterials scienceAnalyteCoatingOptoelectronicsSurface stressBendingDeflection (physics)NanotechnologyOptics
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References
Atomic Force Microscope
Physical Review Letters · 1986 · 14,361 citations
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