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Planar chips technology for miniaturization and integration of separation techniques into monitoring systems

Journal of Chromatography A · 1992 · Vol. 593(1-2) · pp. 253–258
A. ManzDavid HarrisonElisabeth VerpoorteJames C. FettingerAran PaulusHans LüdiH.M. Widmer
Microfluidic and Capillary Electrophoresis ApplicationsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesMiniaturizationMicrosystemChemistrySurface micromachiningNanotechnologyCapillary electrophoresisReagentChemical sensorMicrometerChromatography
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References
Miniaturized total chemical analysis systems: A novel concept for chemical sensing
Sensors and Actuators B Chemical · 1990 · 3,062 citations
Silicon as a mechanical material
Proceedings of the IEEE · 1982 · 2,858 citations
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