article
Defects in epitaxial multilayers
Journal of Crystal Growth · 1975 · Vol. 29(3) · pp. 273–280
J. W. Matthews✉(IBM Research - Thomas J. Watson Research Center)A. E. Blakeslee(IBM Research - Thomas J. Watson Research Center)
Semiconductor Quantum Structures and DevicesSemiconductor materials and interfacesMetallurgical and Alloy ProcessesMaterials scienceEpitaxyDislocationScanning electron microscopeOptical microscopeElectron microscopeCrystallographyChemical vapor depositionMicroscopySubstrate (aquarium)
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References
Defects in epitaxial multilayers I. Misfit dislocations
Journal of Crystal Growth · 1974 · 3,086 citations
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