article Open AccessTop 10% cited
Electrostatically driven vacuum-encapsulated polysilicon resonators
Sensors and Actuators A Physical · 1994 · Vol. 45(1) · pp. 67–84
H.A.C. Tilmans✉(University of Twente)R. Legtenberg(University of Twente)
Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator TechnologiesResonatorMaterials scienceRLC circuitResonance (particle physics)CapacitorVibrationMechanical resonanceStrain gaugeFundamental frequencyLC circuit
Funding
- Stichting voor de Technische Wetenschappen
Citations
408
FWCI
4.23
field-weighted impact
References
21
Percentile
93%
vs. same field & year
Citations per year
References
The resonant gate transistor
IEEE Transactions on Electron Devices · 1967 · 1,073 citations
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