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H
H. Seidel
Fraunhofer Institute for Microengineering and Microsystems
ORCID https://orcid.org/0000-0003-4210-2964
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Top Publications
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
Journal of The Electrochemical Society
1990
1,599 citations
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H. Seidel · Scinovex