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Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler

Wear · 1995 · Vol. 190(1) · pp. 76–88
Chin Y. PoonBharat Bhushan
Adhesion, Friction, and Surface InteractionsSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology TechniquesStylusMaterials scienceSurface roughnessSurface finishMagnificationCeramicSubstrate (aquarium)Composite materialOptical microscopeProfilometer
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References
Contact of nominally flat surfaces
Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1966 · 5,562 citations
The properties of random surfaces of significance in their contact
Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1970 · 882 citations
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Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler · Scinovex