articleTop 1% cited

Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization

IEEE Journal of Quantum Electronics · 1991 · Vol. 27(6) · pp. 1332–1346

J. L. Jewell✉J. P. HarbisonAxel Scherer(AT&T (United States))Ya‐Ze LeeL. T. Florez(AT&T (United States))

Abstract

The authors have designed, fabricated, and tested vertical-cavity surface-emitting lasers (VCSEL) with diameters ranging from 0.5 mu m to>50 mu m. Design issues, molecular beam epitaxial growth, fabrication, and lasing characteristics are discussed. The topics considered in fabrication of VCSELs are microlaser geometries; ion implementation and masks; ion beam etching packaging and arrays, and ultrasmall devices.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>

Semiconductor Lasers and Optical Devices Photonic and Optical Devices Molecular Junctions and NanostructuresFabricationLasing thresholdMaterials scienceLaserOptoelectronicsEtching (microfabrication)Vertical-cavity surface-emitting laserCharacterization (materials science)Molecular beam epitaxyOptics

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Surface emitting semiconductor lasers