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Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
IEEE Photonics Technology Letters · 2004 · Vol. 16(5) · pp. 1328–1330
Pieter Dumon✉(Ghent University)Wim Bogaerts(Ghent University)Vincent Wiaux(Imec the Netherlands)Johan Wouters(IMEC)S. Beckx(Imec the Netherlands)Joris Van Campenhout(Ghent University)Dirk Taillaert(Ghent University)Bert Luyssaert(Ghent University)Peter Bienstman(Ghent University)Dries Van Thourhout(Ghent University)Roel Baets(Ghent University)
Abstract
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.
Photonic and Optical DevicesPhotonic Crystals and ApplicationsOptical Coatings and GratingsSilicon on insulatorMaterials scienceLithographyResonatorImmersion lithographyOptoelectronicsCrosstalkPhotonicsElectron-beam lithographyOptical ring resonators
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