articleTop 10% cited
Simple technique for measurements of pulsed Gaussian-beam spot sizes
Optics Letters · 1982 · Vol. 7(5) · pp. 196–196
J. M. Liu✉(Harvard University)
Abstract
A simple technique for in situ measurements of pulsed Gaussian-beam spot sizes is reported. This technique is particularly useful for measurements on highly focused beam spots. It can also be used for absolute calibration of the threshold-energy fluences for pulsed-laser-induced effects. The thresholds for several effects in picosecondlaser-induced phase transformation on silicon-crystal surfaces are calibrated with this technique.
Laser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSurface Roughness and Optical MeasurementsOpticsMaterials scienceBeam (structure)CalibrationPicosecondGaussian beamLaserLaser beam qualityLaser beamsPhysics
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