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Investigation of the properties of Al1−xCrxN coatings prepared by cathodic arc evaporation
Surface and Coatings Technology · 2005 · Vol. 200(7) · pp. 2114–2122
Andreas Reiter✉(Oerlikon (Liechtenstein))V.H. Derflinger(Oerlikon (Liechtenstein))Barbara Hanselmann(Oerlikon (Liechtenstein))Theo Bachmann(Oerlikon (Liechtenstein))Bernhard Sartory(Universität Innsbruck)
Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materialsMaterials scienceInert gasInertCathodic protectionEvaporationChemical compositionMetallurgyDeposition (geology)Cathodic arc depositionChemical stability
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