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Barrier inhomogeneities at Schottky contacts

Journal of Applied Physics · 1991 · Vol. 69(3) · pp. 1522–1533
J.H. WernerH. Güttler

Abstract

We present a new analytical potential fluctuations model for the interpretation of current/voltage and capacitance/voltage measurements on spatially inhomogeneous Schottky contacts. A new evaluation schema of current and capacitance barriers permits a quantitative analysis of spatially distributed Schottky barriers. In addition, our analysis shows also that the ideality coefficient n of abrupt Schottky contacts reflects the deformation of the barrier distribution under applied bias; a general temperature dependence for the ideality n is predicted. Our model offers a solution for the so-called T0 problem. Not only our own measurements on PtSi/Si diodes, but also previously published ideality data for Schottky diodes on Si, GaAs, and InP agree with our theory.

Semiconductor materials and interfacesIntegrated Circuits and Semiconductor Failure AnalysisSilicon and Solar Cell TechnologiesSchottky diodeSchottky barrierMetal–semiconductor junctionCapacitanceMaterials scienceCondensed matter physicsOptoelectronicsDiodeCurrent (fluid)Chemistry

Funding

  • Bundesministerium für Forschung und Technologie
  • National Cancer Institute
Citations
1,573
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Cited by
Varistor Ceramics
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References
Studies of tunnel MOS diodes I. Interface effects in silicon Schottky diodes
Journal of Physics D Applied Physics · 1971 · 1,759 citations
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