Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask

Abstract

A highly ordered gold nanodot array was fabricated by vacuum evaporation using an anodic porous alumina membrane with through-holes of nanometer scale as a mask. This technique resulted in an orderly arrangement of Au dots with a diameter of approximately 40 nm over a large area on a Si substrate.