articleTop 1% cited

Femtosecond laser ablation of silicon–modification thresholds and morphology

Applied Physics A · 2002 · Vol. 74(1) · pp. 19–25

Jörn Bonse✉(Federal Institute For Materials Research and Testing)S. Baudach(Federal Institute For Materials Research and Testing)Jörg Krüger(Federal Institute For Materials Research and Testing)Wolfgang Kautek(Federal Institute For Materials Research and Testing)M. Lenzner(Federal Institute For Materials Research and Testing)

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Laser Material Processing Techniques Ocular and Laser Science Research Laser-induced spectroscopy and plasmaFluenceAblationMaterials sciencePulse durationSiliconIrradiationFemtosecondSapphireLaserLaser ablation

Funding

Austrian Science Fund

Citations

803

FWCI

27.79

field-weighted impact

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100%

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