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Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching

Applied Physics A · 2006 · Vol. 84(1-2) · pp. 47–61
Cyril HnatovskyR. S. TaylorE. SimovaP. P. RajeevD. M. RaynerV. R. BhardwajP. B. Corkum
Laser Material Processing TechniquesCultural Heritage Materials AnalysisBuilding materials and conservationFemtosecondIsotropic etchingMaterials scienceBorosilicate glassEtching (microfabrication)NanoporousFabricationDielectricScanning electron microscopeLaser
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