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Surface engineering and microtribology for microelectromechanical systems

Wear · 1996 · Vol. 200(1-2) · pp. 305–327
K. Komvopoulos
Force Microscopy Techniques and ApplicationsAdhesion, Friction, and Surface InteractionsMetal and Thin Film MechanicsMicroscale chemistryMaterials scienceStictionMicroelectromechanical systemsNanotechnologySurface forceSurface roughnessSurface engineeringSurface finishCharacterization (materials science)
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365
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4.40
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85
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95%
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