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Recent achievements in miniaturised humidity sensors—a review of transduction techniques

Sensors and Actuators A Physical · 2002 · Vol. 96(2-3) · pp. 196–210
Z. M. Rittersma
Gas Sensing Nanomaterials and SensorsAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsHumidityCapacitive sensingTable (database)NanotechnologyEngineeringSystems engineeringComputer scienceMaterials scienceElectrical engineeringPhysics
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