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Low dielectric constant polymers for microelectronics

Progress in Polymer Science · 2001 · Vol. 26(1) · pp. 3–65
G. Maier
Synthesis and properties of polymersEpoxy Resin Curing ProcessesSilicone and Siloxane ChemistryMicroelectronicsPolymerDielectricMaterials scienceChemical vapor depositionDeposition (geology)Chemical engineeringEtherPolymer chemistryOrganic chemistry
Citations
1,092
FWCI
38.26
field-weighted impact
References
171
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100%
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Citations per year
References
Encyclopedia of polymer science and engineering
Polymer · 1987 · 4,222 citations
Handbook of chemistry and physics
Journal of the Franklin Institute · 1930 · 11,732 citations
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