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Mechanism and kinetics of the diffusion of gold in silicon

Applied Physics A · 1980 · Vol. 23(4) · pp. 361–368
U. GöseleW. FrankA. Seeger
Silicon and Solar Cell TechnologiesSemiconductor materials and interfacesThin-Film Transistor TechnologiesLattice (music)WaferCondensed matter physicsSiliconDiffusionLattice diffusion coefficientMaterials sciencePhysicsCrystallographic defectThermodynamics
Citations
360
FWCI
10.39
field-weighted impact
References
22
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98%
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References
Diffusion Mechanisms and Point Defects in Silicon and Germanium
physica status solidi (b) · 1968 · 470 citations
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