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Transparent conducting ZnO:Al, In and Sn thin films deposited by the sol–gel method

Thin Solid Films · 2003 · Vol. 426(1-2) · pp. 94–99
Jin Hong LeeByung-Ok Park
ZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor TechnologiesDopantMaterials scienceTinThin filmIndiumSubstrate (aquarium)Electrical resistivity and conductivityMicrostructureAluminiumIndium tin oxide
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