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Micromachined metal oxide gas sensors: opportunities to improve sensor performance

Sensors and Actuators B Chemical · 2001 · Vol. 73(1) · pp. 1–26
Isolde SimonNicolae BârsanMichael BauerUdo Weimar
Gas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and SensorsSurface micromachiningMaterials scienceLayer (electronics)FabricationSubstrate (aquarium)OxideNanotechnologyDeposition (geology)Thin filmOptoelectronics
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Environmental gas sensors
IEEE Sensors Journal · 2001 · 310 citations
References
Recent developments in semiconducting thin-film gas sensors
Sensors and Actuators B Chemical · 1995 · 486 citations
New approaches for improving semiconductor gas sensors
Sensors and Actuators B Chemical · 1991 · 1,757 citations
SnO2 sensors: current status and future prospects
Sensors and Actuators B Chemical · 1995 · 998 citations
A New Detector for Gaseous Components Using Semiconductive Thin Films.
Analytical Chemistry · 1962 · 1,456 citations
Temperature modulation in semiconductor gas sensing
Sensors and Actuators B Chemical · 1999 · 477 citations
Semiconducting oxides as gas-sensitive resistors
Sensors and Actuators B Chemical · 1999 · 719 citations
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