articleTop 1% cited
Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon
Applied Physics A · 2004 · Vol. 80(2) · pp. 237–241
Xiangbo Zeng✉(Lawrence Berkeley National Laboratory)Xianglei Mao(Lawrence Berkeley National Laboratory)R. Greif(Lawrence Berkeley National Laboratory)R. E. Russo(Lawrence Berkeley National Laboratory)
Laser-induced spectroscopy and plasmaLaser Material Processing TechniquesOcular and Laser Science ResearchFemtosecondLaserPlasmaNanosecondLaser ablationAblationMaterials scienceSiliconX-ray laserOptics
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